The OptiGauge II is a user-friendly non-contact thickness measurement system for multi-layer materials that delivers reliability and sub-micron accuracy so vital to today’s most advanced industries. The OptiGauge II can be particularly useful in Quality, R&D labs, and production floors because it can improve yields, reduce costs, increase quality, and meet compliance requirements.
Abstract—The silicon wafer manufacturing process relies heavily on precision polished wafers that have uniform thickness and, depending on the application, also control parallelism to a secondary wafer after bonding.
Lumetrics’ low coherence interferometer, commercially marketed as OptiGauge II, is a device capable of measuring the simultaneous wafer thickness, adhesive thickness, and parallelism between surfaces to sub-micron precision. Combined with custom software and a precision XY raster scanner, a wafer or wafer assembly can be fully characterized with respect to layer thicknesses and surface parallelism.
Index Terms—adhesive, flatness, interferometry, metrology, optical thickness measurement, parallelism, silicon, wafer
Lumetrics is the leader in online tubing thickness measurement systems for the ophthalmic, glass, and medical device market. Our engineering team has developed a new fixture that eliminates the problems of line sensitivity that give all online systems trouble. The new fixturing provides for easy loading and accommodates line changeovers to different size tubing. Water is the enemy of all hydrophilic tubing production, and the OptiGauge provides the crucial inner diameter, outter diameter, and wall thickness readings that customers require.
The OptiGauge II is an ideal non-contact thickness measurement system for companies looking to move away from traditional contact measurement systems. It is non-destructive and objective, leaving no margin for operator error. It offers customers extraordinary flexibility in a measurement system. This user-friendly system delivers reliability and sub-micron accuracy so vital to today’s most advanced industries. OptiGauge II can be particularly useful in in Quality, R&D labs, and production floors because it can improve yields, reduce costs, increase quality, and meet compliance requirements. View the press release on our new product announcement!