Abstract — Maintaining proper chemical composition of fluids is an important control parameter for a variety of different production processes. This is especially critical in the medical device manufacturing to maintain high quality standards. One method to monitor fluid composition is to measure its refractive index.
Abstract—Lumetrics, Inc. (Rochester, NY) has made inspection of internal dimensions of microfluidic flow cells possible with low-coherence white light interferometry. The OptiGauge II can measure internal channel heights down to 12 microns with 100 nanometer precision quickly and non-destructively. Machine vision-aided inspection stations can quantify other critical dimensions of entire production runs, ensuring higher product quality and that the performance specifications are met.
Abstract—The silicon wafer manufacturing process relies heavily on precision polished wafers that have uniform thickness and, depending on the application, also control parallelism to a secondary wafer after bonding.
Lumetrics’ low coherence interferometer, commercially marketed as OptiGauge II, is a device capable of measuring the simultaneous wafer thickness, adhesive thickness, and parallelism between surfaces to sub-micron precision. Combined with custom software and a precision XY raster scanner, a wafer or wafer assembly can be fully characterized with respect to layer thicknesses and surface parallelism.
Index Terms—adhesive, flatness, interferometry, metrology, optical thickness measurement, parallelism, silicon, wafer
Lumetrics will be exhibiting at Photonics West this February in Booth #3018! Please stop by and say hello- we have lots of new measurement solutions for your manufacturing process.