The Lumenarium: The official blog of Lumetrics, Inc.

Thickness Measurement of Opaque Materials Using Interferometry

Posted August 17, 2017 by Kristin

Abstract— Lumetrics has developed a fixture that expands precision measurement capabilities of the commercialized low-coherence interferometer, OptiGauge II, to materials that are not translucent to its measurement beam light of 1310nm. The fixture contains two probes oriented towards each other and an optical reference surface. The effects of the temperature on the measurement accuracy are eliminated via a calibration procedure conducted before the measurement.

filed under: Non contact thickness measurement, interferometry, opaque materials thickness measurement

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