The Lumenarium: The official blog of Lumetrics, Inc.

Automated Dimensional Measurement of Microfluidic Flow Cells

Posted May 31, 2017 by Kristin

Abstract—Lumetrics, Inc. (Rochester, NY) has made inspection of internal dimensions of microfluidic flow cells possible with low-coherence white light interferometry. The OptiGauge II can measure internal channel heights down to 12 microns with 100 nanometer precision quickly and non-destructively. Machine vision-aided inspection stations can quantify other critical dimensions of entire production runs, ensuring higher product quality and that the performance specifications are met.

filed under: Non contact thickness measurement, optical thickness measurement, flow cell, machine vision, interferometry, metrology, microfluidics