filed under: Non-Contact Measurement
Abstract—The silicon wafer manufacturing process relies heavily on precision polished wafers that have uniform thickness and, depending on the application, also control parallelism to a secondary wafer after bonding.
Lumetrics’ low coherence interferometer, commercially marketed as OptiGauge II, is a device capable of measuring the simultaneous wafer thickness, adhesive thickness, and parallelism between surfaces to sub-micron precision. Combined with custom software and a precision XY raster scanner, a wafer or wafer assembly can be fully characterized with respect to layer thicknesses and surface parallelism.
Index Terms—adhesive, flatness, interferometry, metrology, optical thickness measurement, parallelism, silicon, wafer
Photonics West 2017 is just around the corner and Lumetrics will be exhibiting in booth #616 from January 31st through February 2nd at the Moscone Center in San Francisco, CA. Lumetrics will be showcasing the OptiGauge® II as well as a live demonstration with the CLAS-IR adaptive optics, operating at telecom wavelengths.
August 15, 2016, Rochester, NY: Lumetrics Inc., the leading manufacturer of precision measurement solution equipment known for offering precision thickness and wavefront measurement instrumentation, is proud to announce the launch of its highly anticipated Web Store. Lumetrics’ Web Store allows customers to easily order probes, fixtures, software, and other accessories in the U.S. (please note that web store shipments are limited to shipments to US State & territories). Lumetrics plans on adding international ordering to the Web Store in the future.
A customer approached Lumetrics with a desire to better understand the thickness profile during the molding process of manufacturing a plastic bottle. Due to cycling mechanical machinery within a 24-inch window around the pre-form, a standard probe (with standoff maximum of 2 inches) could not be used while the machine was running.
A customer approached Lumetrics with a need to determine and certify the precision wedge angle measurement of low angle wedges in the range of 0.5 - 3.5° with a high degree of accuracy. A custom fixture was designed and constructed which included x, y, z and rotation stages with micrometer precision position feedback as shown in the diagram.
The successful implementation of non-contact thickness measurement and precision measurement solutions for our customers is heavily dependant on our team of hard-working and talented Engineers. The following application summary is from one of our Opto-Mechanical engineers after working with a customer to design a custom solution for their critical measurement challenges.
filed under: custom metrology solutions, Lumetrics Inc., manufacturing, Non contact thickness measurement, Optical Interferometry, Optical Measurement, precision measurement, thickness measurement applications
A customer needed a custom automated test system to reduce the inspection time during the setup of their production mold tools. At the time they were using a semi-automated system that would take 10-15 minutes to measure all 10 cavities of the mold tool. Lumetrics was asked to reduce the measurement time to 10 seconds or less with the use of our OptiGauge technology as well as add some addition measurement and functional capabilities.